KIEE - The Transactions of the Korean Institute of Electrical Engineers

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Title	A Novel Schottky Diode with the Self-Aligned Guard Ring
Authors	차승익 ; 조영호 ; 최연익
Page	pp.573-576
ISSN	1975-8359
Keywords	쇼트키 다이오드 ; 가드 링 ; 반응성 이온 식각 ; 항복전압 Schottky diode ; guard ring ; RIE ; breakdown voltage
Abstract	Novel A1-Si Schottky diodes with self-aligned guard rings have been proposed and fabricated using RIE(Reactive Ion Etch). The breakdown voltage of the Schottky diode with the guard ring has been drastically increased to 200V or more in comparison with 46V for the metal overlap Schottky diode.

KIEEThe Transactions of
the Korean Institute of Electrical Engineers