| Title |
Electrical and Optical Properties of ZnO Transparent Conducting Thin Films by Pyrosol Deposition Method |
| Authors |
조우영 ; 송진수 ; 강기환 ; 윤경훈 ; 임경수 |
| Keywords |
Pyrosol Depostition ; ZnO Thin Films ; Transparent Conduting Oxides ; Resistivity ; Transmittance |
| Abstract |
ZnO transparent conducting oxide thin films have been prepared by Pyrosol deposition method and the effects of the different experimental variables on the electrical resistivity and optical transmittance of the prepared films have been investigated in details. The best film with a resistivity of about 8 X 10S0-2TΩcm and transmittance about 80% has been obtained at the substrate temperature of 425°C by using HS12T+CHS13TOH(1:3) solvent and NS12T carrier gas after annealing at 200°C for 40 minutes in vacuum. Furthermore, We have also found the effect of substrate temperature on crystallographic orientation and surface morphology. Annealing of the as-deposited film in vacuum leads to a substantial reduction in resistivity without affecting the optical transmittance and crystallographic orientation. |