| Title |
A Study on the Pulsed Laser Deposition of Diamond like Carbon Thin Films |
| Authors |
심경석(Sim, Gyeong-Seok) ; 이상렬(Lee, Sang-Ryeol) |
| Keywords |
Diamond like carbon(DLC) ; pulsed laser deposition(PLD) ; Raman spectroscopy |
| Abstract |
We fabricated diamond like carbon (DLC) thin films using pulsed laser deposition (PLD) method. Among many deposition parameters, the effects of the deposition temperature and the laser energy density were investigated. Structural properties of the films were studied by Raman spectroscopy. The surface morphologies and cross-section imagies of the films were investigated by atomic force microscopy (AFM) and scanning electron microscopy (SEM) respctively. DLC thin films fabricated at 12 J/cm^2 of a laser energy density and 300°C of a deposition temperature showed the best quality. |