| Title |
Structural and Dielectrical Properties of PZT(30/70)/PZT(70/30) Heterolayered Thin Film Prepared by Sol-Gel Method |
| Authors |
김경균(Kim, Gyeong-Gyun) ; 정장호(Jeong, Jang-Ho) ; 이성갑(Lee, Seong-Gap) ; 이영희(Lee, Yeong-Hui) |
| Keywords |
PZT heterolayered film ; sol-gel method ; Dielectric properties ; Leakage current |
| Abstract |
Ferroelectric PZT(30/70)/PZT(70/30) heterolayered thin films were fabricated by spin-coating method on the Pt/Ti/SiO_2Si substrate alternately using(30/70) and PZT(70/30) alkoxide solutions prepared by sol-coating method. The coating and heating procedure was repeated six times to form PZT heterolayered films, and thickness of the film obtained by one-times drying/sintering process was about 40-50 nm. All PZT heterolayered films, showed dense and homogeneous structure without the presence of rosette sturctrue. The relative dielectric constant, remanent polarization and leakage current density of PZT heterolayered films were superior to those of single composition PZT(30/70) and PZT(70/30) films, and those values for the PZT-6 film were 975, 21 μC/cm^2 and 8×10^{-9} A/cm^2, respectively. And the PZT-6 heterolayered film showed fairly good fatigue characteristics of remanent polarization and coercive field after application of 10^8 switching cycles. |