Title |
Influence of Ambient Gases on Field Emission Performance in the Frit-sealing Process of Mo-tip Field Emission Display |
Authors |
주병권(Ju, Byeong-Kwon) ; 김훈(Kim, Hoon) ; 정재훈(Jung, Jae-Hoon) ; 김봉철(Kim, Bong-Chul) ; 정성재(Jung, Sung-Jae) ; 이남양(Lee, Nam-Yang) ; 이윤희(Lee, Yun-HI) ; 오명환(Oh, Myung-Hwan) |
Keywords |
FED(field emission display) ; Mo-tip FEA(field emitter array) ; vacuum annealing ; annealing ambient |
Abstract |
The influence of ambient gases on field emission performance of Mo-field emitter array(FEA) in the frit-sealing step of field emission display(FED) packaging process was investigated. Mo-tip FEA was mounted on the glass substrate having a surrounded frit(Ferro FX11-137) and fired at 415°C in the ambient gases of air, N_2 and Ar. The Ar gas was proved to be most proper ambient among the used gases through evaluating the turn-on voltage and field emission current of the fired Mo-tip FEA devices. It was confirmed that the Mo surface fired in Ar ambient was less oxidized when compared with another ones annealed in air and Ar ambient by the AFM, XPS, AES and SIMS analysis. Finally, the 3.5 inch-sized Mo-tip FED, which was packaged using frit-sealing process in the Ar ambient, was proposed. |