| Title |
Analysis of pulsed Plasma Reactor using Modelling Method |
| Authors |
최영욱(Choe, Yeong-Uk) ; 이홍식(Lee, Hong-Sik) ; 임근희(Im, Geun-Hui) ; 김태희(Kim, Tae-Hui) ; 백민수(Baek, Min-Su) ; 장길홍(Jang, Gil-Hong) |
| Keywords |
reactor modelling ; stray capacitance ; impedance matching ; pulsed plasma ; EMTP |
| Abstract |
The pulsed plasma wire-plate reactor was analyzed on the basis of experiment, EMTP simulation and modelling method. Though the reactor has a non-linear impedance characteristics, we demonstrate that the reactor impedance can be approximately analyzed with the measured initial capacitance and average resistive component of flat zone. Using this modelling method, the influence of the reactor capacitance on the impedance matching between pulse generator and reactor can be investigated. From this, we found that the energy of 95% was delivered form pulse generator to reactor at the ratio of C_r/C_p? 0.3, where C_p is pulse generator capacitance, C_r is reactor capacitance. |