| Title |
Growth of Vertically Aligned Carbon Nanotubes on Co-Ni Alloy Metal |
| Authors |
류재은(Ryu, Jae-Eun) ; 이철진(Lee, Cheol-Jin) ; 이태재(Lee, Tae-Jae) ; 손경희(Son, Gyeong-Hui) ; 신동혁(Sin, Dong-Hyeok) |
| Keywords |
Carbon nanotube ; Co-Ni alloy ; surface morphology ; HF dipping ; NH3 pretreatment ; catalyst metal ; nucleation seed |
| Abstract |
We have grown vertically aligned carbon nanotubes in a large area of Co-Ni codeposited Si substrates by the thermal CVD usign C_2H_2 gas. Since the discovery of carbon nanotubes, growth of carbon nanotubes has been achieved by several methods such as laser vaporization, arc discharge, and pyrolysis. In particular, growth of vertically aligned nanotubes is important to flat panel display applications. Recently, vertically aligned carbon nanotubes have been grown on glass by PECVD. Aligned carbon nanotubes can be also grown on mesoporous silica and Fe patterned porous silicon using CVD. In this paper, we demonstrate that carbon nanotubes can be vertically aligned on catalyzed Si substrate when the domain density of catalytic particles reaches a certain value. We suggest that steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically and each nonotubes are grown in bundle. |