| Title |
Design and fabrication of a Micromechanical Switch Using Polysilicon Surface Micromachining |
| Authors |
채경수(Chae, Gyeong-Su) ; 한승오(Han, Seung-O) ; 하종민(Ha, Jong-Min) ; 문성욱(Mun, Seong-Uk) ; 박정호(Park, Jeong-Ho) |
| Keywords |
MEMS ; Logic Gate ; Micromechanical Switch ; Actuator ; Surface Micromachining |
| Abstract |
A micromechanical switch that can be used as a logic gate is described in this paper. This switch consists of fixed input electrodes an output electrode Vcc/GND electrodes and movable plates suspended by crab-leg flexures. for mechanical switching of an electrical signal a parallel plate actuator which comes in contact with output electrode was used. Provided that movable plates are connected to Vcc and a low input voltage(ground signal) is applied to the fixed input electrodes the movable plates are pulled by an electrostatic force between the fixed input electrodes and the movable plates. the proposed micromechanical switch was fabricated by surface micromachining technology with2μm -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23.5V |