KIEE - The Transactions of the Korean Institute of Electrical Engineers

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The Transactions of the Korean Institute of Electrical Engineers

The Transactions of the Korean Institute of Electrical Engineers

ISO Journal TitleTrans. Korean. Inst. Elect. Eng.

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Title	Electromagnetic Vibration Transducer Using Silicon Elastic Body For Implantable Middle Ear Hearing Aid Applications
Authors	이기찬(Lee, Ki-Chan) ; 이세규(Lee, Se-Kyu) ; 박세광(Park, Se-Kwang) ; 조진호(Cho, Jin-Ho) ; 이상흔(Lee, Sang-Heun)
Page	pp.583-588
ISSN	1975-8359
Keywords	Bio-MEMS ; implantable ; vibration ; electromagnetic ; hearing aid ; transducer
Abstract	This paper presents the design and fabrication of micro electromagnetic vibration silicon elastic body characterized with small size, high efficiency and selective frequency bandwidth for Bio-MENS applications, such as implantable middle ear hearing aid. The presented electromagnetic vibration transducer that composed of wounded coil, permanent magnet and 4-beam cross type elastic body is fabricated by using of micromachining technology. The fabricated transducer has experimental characteristics, that is 5 nm/mA of an energy trasfer rate at the frequency range of 100∼2800 Hz. It has a size of 2×2×2.5 mm^3.

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