| Title |
Synthesis of Diamond Thin Film on WC-Co by RF PACVD |
| Authors |
김대일(Kim, Dae-Il) ; 이상희(Lee, Sang-Hee) ; 박구범(Park, Gu-Bum) ; 박상현(Park, Sang-Hyun) ; 이용근(Lee, Yong-Geun) ; 김보열(Kim, Bo-Youl) ; 김영봉(Kim, Young-Bong) ; 이덕출(Lee, Duck-Chool) |
| Keywords |
Diamond thin film ; RF PACVD ; WC-Co |
| Abstract |
Diamond thin films were synthesized on WC-Co substrate at various experimental parameters using 13.56MHz RF PACVD)radio frequency plasma-assisted chemical vapor deposition). In order to increased the nucleation density, the WC-Co substrate was polished with 3μm diamond paste. And the WC-Co substrate was preatreated in HNO_3 : H_2O = 1:1 and O_2 plasma. In H_2-CH_4 gas mixture, the crystallinity of thin film increased with decreasing CH_4 concentration at 800W discharge power and 20torr reaction pressure. In H_2-CH_4-O_2 gas mixture, the crystallinity of thin film increased with increasing O_2 concentration at 800W discharge power, 200torr reaction pressure and 4% CH_4 concentration. |