| Title |
Fabrication and Measurement of Tunable Millimeter-wave Filters |
| Authors |
박재형(Park, Jae-Hyoung) ; 김홍득(Kim, Hong-Teuk) ; 권영우(Kwon, Young-Woo) ; 김용권(Kim, Yong-Kweon) |
| Keywords |
micromachined tunable bandpass filters ; two-pole lumped elements filter ; two-pole resonators filter ; movable cantilever beam |
| Abstract |
In this paper, new micromachined tunble bandpass filters for multi-band millimeter-wave telecommunication systems are proposed. Two types of mm-wave tunable filters are fabricated using micromachning technology and the responses of the filters are measured. One is two-pole lumped elements filter and the other two-pole resonators filter. Frequency tunability of the filter is achieved by changing the gap between a common CPW ground plate and the movable cantilever beam connected to the transmission line with the controllable renge of 2.5μm. The deflection of cantilever beam is measured with the applied DC voltage. With the applied bias voltage from 0 to 50 V, the fabricated filters show 0.6 GHz(2.3%) at 26.6 GHz, and 0.8 GHz(2.5%) at 32 GHz center frequency shift for the lumped elements and resonators filter, respectively. The life time of the fabricated gold cantilever structure are tested. |