| Title |
Growth of Highly Purified Carbon Nanotubes by Thermal Chemical Vapor Deposition |
| Authors |
유재근(Yu, Jae-Geun) ; 박정훈(Park, Jeong-Hun) ; 김대운(Kim, Dae-Un) ; 이철진(Lee, Cheol-Jin) ; 손권희(Son, Gwon-Hui) ; 신동혁(Sin, Dong-Hyeok) ; 문인기(Mun, In-Gi) |
| Keywords |
탄소나노튜브 ; 열화학기상증착법 ; 촉매금속 ; 표면처리 ; |
| Abstract |
We have grown carbon nanotubes by thermal chemical vapor deposition of C_{2}H_{2} on catalytic metal deposited on silicon oxide substrates. Highly purified carbon nanotubes are uniformly grown on a large area of the silicon oxide substrates. It is observed that surface modification of catalytic metals deposited on substrates by either etching with dipping in a HF solution and/or NH_{3} pretreatment is a crucial step for the nanotube growth prior to the reaction of C_{2}H_{2} gas. The diameters of carbon naotubes could be controlled by applying the different catalytic metals. |