| Title |
Preparation of 1-3 PZT Composites Fabricated Using Micro PMMA Mold |
| Authors |
박준식(Park, Joon-Shik) ; 조진우(Cho, Jin-Woo) ; 정석원(Jung, Suk-Won) ; 박순섭(Park, Soon-Sup) ; 이선호(Lee, Sun-Ho) ; 김동현(Kim, Dong-Hyun) ; 한진호(Han, Jin-Ho) |
| Keywords |
PZT ; composite ; transducer ; array ; micro-pressing ; electro-mechanical |
| Abstract |
We investigated preparation of 1-3 PZT composites for medical ultrasonic transducer array (briefly UTA) using micro pressing method. The proposed process was using pressing PZT green sheet by PMMA micro mold obtained from X-ray lithography. Microstructures, electriacl and electro-mechanical properties of fabricated composites were analyzed. Dielectric constant at 1kHz and thickness mode electro-mechanical coupling coefficient of 6.2mm×6.2mm×422μm UTA sample were 1754 and 51%, respectively. Microstructures of sintered PZT showed dense and uniform. And PZT phases were well crystallized. Micro pressing method is a mass productive process in case of using injection molded PMMA by batch type LIGA process. |