| Title |
Fabrication of Ion Mass Analyzer and its Operational Characteristics |
| Authors |
김광훈(Kim, Guang-Hoon) ; 최영욱(Choi, Young-Wook) ; 이홍식(Lee, Hong-Sik) ; 임근희(Rim, Geun-Hie) ; Nikiforov, S.A.(Nikiforov, S.A.) |
| Keywords |
ion mass analyzer ; ion composition ; magnetic-sector ; ion loss |
| Abstract |
The information of the ion composition in plasma applications is required to characterize a plasma. A better understanding of ion species composition ratio and its spacial distribution, etc. is thus necessary in plasma-related processes, such as thin film deposition, plasma-based ion implantation, semiconductor processing, and so on. In this research, a compact ion mass analyzer that is based on magnetic sector analyzer was developed and its operational characteristics were studied in nitrogen plasma. |