| Title |
Etching of Zinc Oxide(ZnO) Using Isomer of Butyl Acetate |
| Authors |
이봉주(Lee, Bong-Ju) ; 정헌상(Jeong, Heon-Sang) ; 이경섭(Lee, Gyeong-Seop) |
| Keywords |
Atmospheric pressure ; Zinc oxide etching ; Butyl acetate ; Zinc oxide etching ; Activation energy |
| Abstract |
Using the plasma that we developed to generate a low-temperature plasma at atmospheric pressure, we have investigated the etching possibility of an air-exposed zinc oxide(ZnO) thin films. Hydrogen and methane radicals generated from the plasma were observed and their intensity was found to be dependent on the isomer of butyl acetate by an analysis with optical emission spectrosxopy. The etching ability of this plasma was evaluated by an emission intensity, etching time, rf power. |