| Title |
Fabrication of the Microchannel Integrated with the Inner Sensors for Accurate Measuring Fluid Temperature |
| Authors |
박호준(Park, Ho-Jun) ; 임근배(Im, Geun-Bae) ; 손상영(Son, Sang-Yeong) ; 송인섭(Song, In-Seop) ; 박정호(Park, Jeong-Ho) |
| Abstract |
A rectangular straight microchannel, integrated with the resistance temperature detectors(RTDs) for temperature sensing and a micro-heater for generating the Temperature gradient along the channel, was fabricated. Its dimension is 57μ{ textrm} m(H)×200μ{ textrm} m(W)×48,050μ{ textrm} m(L), and RTDs were placed at the inner-channel wall. Si wafer was used as a substrate. For the fabrication of RTDs, 5300 AA thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, the glass wafer was bonded with Si wafer by anodic bonding, so that the RTDs are located inside the microchannel. Temperature coefficient of resistance(TCR) values of the fabricated Pt-RTDs were 2800~2950ppm°C and the variation of TCR value In the range of O~100°C was less than 0.3％. Therefore, it was proved that the fabricated Pt-RTDs without annealing were excellent as temperature sensors. The temperature distribution in the microchannel was investigated as a function of mass flow rate and heating power. The temperature increase rate diminished with decreasing the applied power and increasing the mass flow rate. It was confirmed from the comparison with the simulation results that the temperature measured inside the microchannel is more accurate than measuring the temperature measured at the outer wall. The proposed temperature sensing method and microchannel are expected to be useful in microfluidics researches. |