| Title |
An Efficient Three-Dimensional Capacitance Extraction Based on finite Element Method Adopting Variable Division |
| Keywords |
Capacitance ; Capacitance Extraction ; Parasitic Extraction ; Element Method |
| Abstract |
This paper proposes an efficient method for computing the 3-dimensional capacitance of complex structures. The proposed method Is based on Finite Element Method(FEM) and expands the conventional FEM by adopting variable division. This method improves the extraction efficiency 50 times when compared to the conventional FEM with equal division. The proposed method can be used efficiently to extract electrical parameters of on/off-chip interconnects in VLSI systems. |