| Title |
The Deposition and Properties of Surface Textured ZnO:Al Films |
| Authors |
유진수 ; 이정철 ; 김석기 ; 윤경훈 ; 박이준 ; 이준신 |
| Keywords |
TCO(transparent conductive oxide) ; ZnO:Al ; Thin film solar cells ; Light trapping ; rf magnetron sputtering |
| Abstract |
Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCI (0.5%) to examine the electrical and surface morphology properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure md the substrate temperature. In low pressures (0.9mTorr) and high substrate temperatures (≤300°C), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells. |