| Title |
A Study for Optimum Design and Fabrication of Microscale Solenoid RF Chip Inductors |
| Keywords |
microscale ; RF chip inductor ; solenoid ; HFSS |
| Abstract |
In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0×0.5×0.5㎣. 96% Al_2 O_3and I-type were used as the material and shape of the core, respectively. The copper (Cu) wire with 6 turns was employed as the coils. The diameter (40μ{ textrm} m) and position (middle) of the coil and the length (0.35mm) of solenoid were determined by a high-frequency structure simulator (HFSS) to maximize the performance of the inductors. High frequency characteristics of the inductance (L) and quality-factor (Q) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 10.8nH and quality factors of 25.2 to 50 over the frequency ranges of 250MHz to l GHz, and show results comparable to those measured for the inductors prepared by CoilCraf t^{Tm} . The simulated data predicted the high-frequency data of the L and Q of the inductors developed well.l. |