| Title |
Optical E-H Transition Properties of Inductively Coupled Plasma with Ar Gas Pressure and RF Pourer |
| Authors |
허인성 ; 조주웅 ; 이영환 ; 김광수 ; 최용성 ; 박대희 |
| Keywords |
Electrodeless fluorescent lamp ; Inductively coupled plasma ; RF power ; Emission intensity |
| Abstract |
In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56 [MHz] was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar I line, luminance were investigated. At this time, the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10∼60 [mTorr], 10∼300 [W], respectively. From emission intensity and lumnance intensity results, the mode transition from E-mode to H-mode was observed. This implies that this method can be used to find an optimal RF power for efficient light illumination in an electrodeless fluorescent lamp. |