| Title |
Analysis of Electrical Property on Inductively Coupled Ar Plasma for Gas Pressure |
| Authors |
조주웅 ; 이영환 ; 김광수 ; 허인성 ; 최용성 ; 박대희 |
| Keywords |
Electrodeless Lamp ; Inductively Coupled Plasma ; RF Power |
| Abstract |
Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56(MHz) have been measured over a wide range of power at gas pressure ranging from 1∼70(mTorr). |