| Title |
Development of an Electromagnetic Actuator for Probe-based Data using Si Storage by Process and Cu Electroplating |
| Keywords |
electromagnetic actuator ; data storage ; Si leaf spring ; Cu coil ; SmCo permanent magnets ; resonance frequency |
| Abstract |
An electromagnetic actuator has been designed and fabricated for Probe-based data storage applications. The actuator consists of permanent magnets(SmCo) housing and a media Platform which is connected to the Si frame by four couples of Si leaf springs. In order to generate electromagnetic force, Cu coils were electroplated under the media platform. The magnetic field distribution was calculated with 3D Finite Element Method of Maxwell 3D program. The field strength felt by Cu coils was estimated to be about 0.33T when the distance between the media platform and permanent magnets is 200μ textrm m. The static and dynamic motions of the actuator were analyzed by FEM method with ANSYS 5.3. The measured displacements of the actuator were about pm92μ textrm m for input current of pm40㎃ and the resonance frequency was 100Hz. The proposed electromagnetic actuator can be utilized for media driver of probe-based data storage system |