| Title |
A Fabrication of IR CO_2 Sensor based on the MEMS and Characteristic Evaluation |
| Authors |
김신근(Kim Shin-Keun) ; 한용희(Han Yong-Hee) ; 문성욱(Moon Sung-Wook) |
| Keywords |
MEMS Infrared Sensor ; Microbolometer ; Surdace Micromachining ; Bulk Micromachining |
| Abstract |
In this paper, we fabricated CO_2 gas sensor based on the MEMS infrared sensor and characterized its electrical and CO_2-sensing properties. The fabricated CO_2 gas sensor by MEMS technique has many advanges over NDIR(nondispersive) CO_2 sensor such as monolithic fabrication, very high selectivity on CO_2, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and CO_2 filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure CO_2 concentration more accurately with high reliability |