| Title |
Development of Nano-Stereolithography Process for Precise Fabrication of Three-Dimensional Micro-Devices |
| Authors |
박상후(Park Sang-Hu) ; 임태우(Lim Tae Woo) ; 양동열(Yang Dong-Yol) ; 이신욱(Yi Shin Wook) ; 공홍진(Kong Hong-Jin) ; 이광섭(Lee Kwang-Sup) |
| Keywords |
Two-Photon Polymerization ; Nano-StereolithOgraphy ; 3D Microstructures ; Femtosecond Laser |
| Abstract |
A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system. |