| Title |
Fabrications and Characteristics of Microfluidic Systems Actuated by Thermopneumatic Method |
| Authors |
유종철(Yoo Jong-Chul) ; 강치중(Kang C. J.) ; 김용상(Kim Yong-Sang) |
| Keywords |
Microfluidic System ; Micropump ; Microvalve ; PDMS ; ITO |
| Abstract |
We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at. a duty ratio of 1 % and a frequency of 2 Hz with a fixed power of 500 mW. The measured power at flow cut-off is 500 mW for the microvalve whose channel width, depth and membrane thickness were 400 μm, 110 μm, and 320 μm, respectively. |