| Title |
Fabrication and Evaluation of the Flexible and Implantable Micro Electrode |
| Authors |
백주열(Baek Ju-Yeoul) ; 권구한(Kwon Gu-Han) ; 이상운(Lee Sang-Woon) ; 이기암(Lee Ky-Am) ; 이상훈(Lee Sang-Hoon) |
| Keywords |
PDMS ; Flexible and Implantable Micro Electrode ; Oxygen Plasma ; Gold Electroplating ; In-vivo Test. |
| Abstract |
In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ATi and 1000 A Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 μm. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 μm with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days. |