| Title |
Humidity-Sensing Properties of RF Sputtered Vanadium Oxide Thin Films |
| Authors |
최복길(Choi, Bok-Gil) ; 최창규(Choi, Chang-Kyu) ; 김성진(Kim, Sung-Jin) |
| Keywords |
Vanadium Oxide ; Thin Films ; Sputtering ; Humidity Sensor |
| Abstract |
Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from V_2O_5 target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures(27°C, 400°C). Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with 0%O_2 partial pressure at 400°C exhibit greater sensitivity to humidity change than others. |