| Title |
Effect of Rise Time of a Pulse Bias Voltage on Atmospheric Plasma Generation |
| Authors |
김재혁(Kim, Jae-Hyeok) ; 진상일(Jin, Sang-Il) ; 김영민(Kim, Young-Min) |
| Keywords |
MEMS ; Electroplating ; Self-aligned ; Discharge ; Plasma |
| Abstract |
We investigate the effect of rise time of a pulse bias voltage on atmospheric plasma generation. With the faster rise time of the pulse bias, the glow discharge appears to be more uniformly generated along the electrodes. I-V measurement confirms that higher loading power can be obtained using the faster rise time. A new understanding for atmospheric plasma generation at a micro-gap electrode is suggested. |