| Title |
A Study on the Ballast Design of a Inductively Coupled Plasma Light Source based on Oscillation Theory |
| Authors |
김철진(Kim, Cherl-Jin) ; 임연찬(Yim, Youn-Chan) |
| Keywords |
Discharge length ; Barkhausen criterion ; Inductively coupled plasma ; Half-bridge ; coil turns |
| Abstract |
We studied on the design of electrical parameters for ICP(Inductively Coupled Plasma) light sources which can be effective to improve the electrical power efficiency of it. These parameters were derivated from Barkhausen theory about the oscillating condition of a ballaster. The relationships of f-I_p and f-n were calculated theoretically and then these relationships were compared with the measured results about I_p and power depending to a discharge length(l) of ICP light source. Finally, we can see that a specific range of induced current depending to a discharge length would be necessary to minimize the change of magnetization inductance and driving frequency at driving. |