| Title |
Microplasma-Jet Device for Bio-medical Application |
| Authors |
김강일(Kim, Kang-Il) ; 홍용철(Hong, Yong-Cheol) ; 김근영(Kim, Guen-Young) ; 양상식(Yang, Sang-Sik) |
| Keywords |
Atmospheric pressure ; Low temperature ; Plasma-jet ; Micromachining technology ; Bio medical application |
| Abstract |
This paper presents an atmospheric microplasma-jet device for bio~medical application. The microplasma-jet device consists of four components; a thin Ni anode, porous alumina insulator, a stainless steel cathode and an aluminum case. The anode has 8 holes, and hole diameter and depth are 200 μm and 60 μm, respectively. The discharge test was performed in atmospheric pressure using nitrogen gas and AC voltage at the optimum gas flow rate of 4 Vmin. The plasma-jet is ejected stably for the input voltage ranging from 5.5 to 9.5 kV_{p-p}. The plasma becomes dense as the input voltage increases, which was verified by the hydrophilicity change of PMMA surface treated by the plasma. The temperature increasement of the aluminum film exposed to plasma-jet illustrates that the micro plasma-jet device is feasible for bio-medical application. |