| Title |
The Characteristic and Formation of Ti(B,N) Films on Steel by EA Hot Filament CVD |
| Authors |
윤중현(Yoon, Jung-H.) ; 최용(Choi, Yong) ; 최진일(Choe, Jean-I.) |
| DOI |
https://doi.org/10.5370/KIEE.2012.61.4.585 |
| Keywords |
(B,N)Films ; Microwave plasma hot filament CVD ; Resistance wear coating tool |
| Abstract |
The characteristics of interface layer and the effect of mole fraction of inlet gas mixture(B_2H_6/H_2/N_2/TiCl_4) on the microstructure of Ti(B,N) films were studied by microwave plasma hot filament CVD process. Ti(B,N) films were deposited on a substrate(STD-61) to develop a high performance of resistance wear coating tool. Ti(B,N) films were obtained at a gas pressure of 1 torr, bias voltage of 300 V and substrate temperature of 480°C in B_2H_6/H_2/N_2/TiCl_4gas system. It was found that TiN, TiB_2, TiB and hexagonal boron nitride(h-BN) phases exist in thin layer on the STD-61. |