| Title |
An Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process |
| Authors |
신명구(Shin, Myung-Goo) ; 이지형(Lee, Jee-Hyung) |
| DOI |
https://doi.org/10.5370/KIEE.2012.61.9.1330 |
| Keywords |
Auto metrology ; Sampling ; Quality ; Productivity ; Metrology capacity |
| Abstract |
This paper proposes an automatic measurement sampling method for the semiconductor manufacturing process. The method recommends sampling rates using information of process capability indexes and production scheduling plan within the restricted metrology capacity. In addition, it automatically controls the measurement WIP (Work In Process) using measurement priority values to minimize the measurement risks and optimize the measurement capacity. The proposed sampling method minimizes measurement controls in the semiconductor manufacturing process and improves the fabrication productivity via reducing measurement TAT (Turn Around Time), while guaranteeing the level of process quality. |