| Title |
A Study on the G-Sensitivity Error of MEMS Vibratory Gyroscopes |
| DOI |
https://doi.org/10.5370/KIEE.2014.63.8.1075 |
| Keywords |
Micro electro-mechanical systems ; Inertial measurement unit ; Inertial navigation system ; g-sensitivity ; Vibratory gyroscope |
| Abstract |
In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope. |