| Title |
Characterization of Inductively Coupled Ar/CH4 Plasma using the Fluid Simulation |
| Authors |
차주홍(Cha, Ju-Hong) ; 이호준(Lee, Ho-Jun) |
| DOI |
https://doi.org/10.5370/KIEE.2016.65.8.1376 |
| Keywords |
13.56 Mhz ; Fluid simulation ; PECVD ; Ar/CH_4 plasma ; Hydro carbon plasma |
| Abstract |
The discharge characteristics of inductively coupled Ar/CH_4 plasma were investigated by fluid simulation. The inductively coupled plasma source driven by 13.56 Mhz was prepared. Properties of Ar/CH_4 plasma source are investigated by fluid simulation including Navier-Stokes equations. The schematics diagram of inductively coupled plasma was designed as the two dimensional axial symmetry structure. Sixty six kinds of chemical reactions were used in plasma simulation. And the Lennard Jones parameter and the ion mobility for each ion were used in the calculations. Velocity magnitude, dynamic viscosity and kinetic viscosity were investigated by using the fluid equations. Ar/CH_4 plasma simulation results showed that the number of hydrocarbon radical is lowest at the vicinity of gas feeding line due to high flow velocity. When the input power density was supplied as 0.07W/cm^3, CH radical density qualitatively follows the electron density distribution. On the other hand, central region of the chamber become deficient in CH3 radical due to high dissociation rate accompanied with high electron density. |