Title |
Analysis of the Gain Characteristic in LLCC Resonant Converter for Plasma Power Supply |
Authors |
권민준(Kwon, Min-Jun) ; 김태훈(Kim, Tae-Hun) ; 이우철(Lee, Woo-Cheol) |
DOI |
https://doi.org/10.5370/KIEE.2016.65.12.1992 |
Keywords |
LLC resonant converter ; LLCC ; Plasma power supply |
Abstract |
The plasma process is applied to various industrial fields such as high-tech IT industry, textiles and medical. Therefore, there is increasing interest in the plasma power supply, and demand for power devices of high efficiency and high power density is increased. Plasma power supply for process must solve the arc problem, when the plasma is unstable. The output capacitor is closely related to the arc problem. If the output capacitor is smaller, the damage from the arc problem is reduced. However, the small value of the output capacitor affects the operating characteristics of the power supply. In this paper, a LLC resonant converter is adopted, because it can achieve high efficiency and power density in the plasma DC power supply. However, due to the small value of the output capacitor, the converter is operated as a LLCC resonant converter. Therefore, a gain characteristic of LLCC resonant converter is analyzed by using the FHA (First Harmonic Approximation) in plasma power supply. Simulation and experimental results are presented to verify the characteristic analysis of LLCC Resonant Converter. |