| Title |
A Study on the Microstructural Properties of DLC Films Deposited on the WC-Co Alloy by Filtered Vacuum Arc Method |
| Authors |
강병모(Byeong-Mo Kang) ; 정운조(Woon-Jo Jeong) |
| DOI |
http://doi.org/10.5370/KIEE.2019.68.4.547 |
| Keywords |
DLC ; FVA ; Thin Film ; Raman analysis ; XPS |
| Abstract |
In this study, DLC films were deposited on the cobalt cemented tungsten carbide(WC-Co) substrate adopting the filtered vacuum arc(FVA) technique at different substrate bias voltages and various cobalt content. As a result of Raman analysis, the spectra from all samples in this study have similar shape, with a broad skewed peak centered at approximately 1,550[cm-1], which is the characteristic of the diamond-like structure. Each spectrum was decomposed into two Gaussian line curves, one at the lower wave numbers between 1,322[cm-1] and 1,329[cm-1](D peak) and the other at the higher wave numbers between 1,565[cm-1] and 1,570[cm-1](G peak). However, we could not find any change of Raman-shift. According to XPS, as the cobalt content increased, sp3 ratio was decreased. This effect can be inferred that the cobalt binder suppress diamond nucleation and subsequent growth of diamond. |